MODELING OF TECHNOLOGY OF THIN TENZORESISTENCE FILM DEPOSITION

Kuchumov Evgeniy Vladimirovich, candidate of technical sciences, senior staff scientist, Research Institute of Physical Measurements, evgenii_kuchumov@mail.ru
Popchenkov Dmitriy Valentinovich, head of the research laboratory 621, Research Institute of Physical Measurements, volohov@niifi.ru

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This article defines few basic principles needed for development of elementary mathematical model by vacuum evaporation.

mathematical modeling, thin film deposition, vacuum evaporation.